=================================================================================
|
Static SIMS |
TOF-SIMS |
Dynamic SIMS |
|
=================== |
=================== |
=================== |
Flux |
< 1013 ions/cm2 (per experiment) |
|
~1017 ions/cm2 (minimum dose density) |
Lateral resolution |
Down to below 100 nm |
60 nm |
Probe mode: 200 nm; Microscope mode: 1 µm |
Sampling depth |
Outer 1 to 2 monolayers |
1Å – 3 nm |
Depth resolution 2-30 nm (10 monolayers) |
Range of elements |
All |
Quantification |
Standard Required |
Mass range |
Typically up to 1000 amu |
10000 amu |
|
Information |
Elemental + molecular |
|
Elemental |
Molecular Information |
|
Some functional groups, Molecular weight, Polymer repeat unit, Unique mass fragments |
|
Chemical bonding |
Yes |
|
In rare cases only |
Detection Limit |
1 ppm |
ppb (for some elements) - ppm |
Destructive |
Yes, if sputtered long enough |
|
Yes, material removed during sputtering |
Accuracy |
|
|
2 % |
Type of analysis |
Surface mass spectrum, 2D surface ion image |
|
Depth profile (probe into µm below surface), mass spectrum, 3D image depth profile |
Sample requirements |
Solid; vacuum compatible |
Sample damage |
Minimal |
|
Destructive in analyzed area (up to 500 µm per area) |
Main application |
Surface chemical analysis, organics, polymers |
|
|