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Comparison between XPS and SIMS
- Practical Electron Microscopy and Database -
- An Online Book -
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https://www.globalsino.com/EM/
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XPS |
Static SIMS |
TOF-SIMS |
Dynamic SIMS |
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Lateral resolution |
10 µm |
Down to below 100 nm |
60 nm |
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Depth probed |
1-10 nm |
Outer 1 to 2 monolayers |
1Å – 3 nm |
Depth resolution 2-30 nm, probe into µm below surface |
Range of elements |
All except H, He |
All |
Quantification |
Excellent without standard |
Standard Required |
Mass range |
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Typically up to 1000 amu |
10000 amu |
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Molecular Information |
Functional group bonding |
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Some functional groups, Molecular weight, Polymer repeat unit, Unique mass fragments |
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Chemical bonding |
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Yes |
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In rare cases only |
Detection Limit |
0.1% |
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ppb - ppm |
Destructive |
No |
Yes, if sputtered long enough |
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Yes, material removed during sputtering |
Accuracy |
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2 % |
Imaging/mapping |
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Yes |
Sample requirements |
Solid; vacuum compatible |
Main application |
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Surface chemical analysis, organics, polymers |
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