Table 1762. Milestone of SEM development.

DATE	NAME	MILESTONE
1924	de Broglie	High-speed electrons exist as waves
Mid-1930s	Knoll	Designed a microscope in which its electron probe could be simultaneously scanned over a specimen surface and synchronized with a cathode ray tube (CRT) to produce an image
1960	Everhart and Thornley [1]	Developed a more efficient secondary electron detector for the SEM
1965		Commercial SEM
Mid-1980s		Personal computers (PCs) were used to control slow speed CCD cameras in EMs
1990s		Developed temperature-controlled stages in combination with variable pressure SEMs (VPSEM) to study electron-beam-sensitive materials more easily (environmental SEM)

[1] Goldstein JI, Newbury DE, Joy DC, Lyman CE, Echlin P, Lifshin E, Sawyer L, Michael JR (2003) Scanning electron microscopy and X-ray microanalysis. Plenum, New York.