Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

International Technology Roadmap for Semiconductors

Table 2062 shows the summary of 2003 Roadmap, listing the node, gate length, equivalent oxide thickness of high power (CPU) and low standby power devices (mobile), gate oxide material, and gate electrode material.

Table 2062. Summary of 2003 Roadmap.

Year
2001
2003
2005
2007
2009
2012
2016
2018
Node
130
100
80
65
45
32
22
18
ASIC 1/2 pitch
150
107
80
65
45
32
25
18
Physical gate
length
65
45
32
25
20
13
9
7
Tox hi power
1.5
1.3
1.1
0.9
0.8
0.6
0.5
0.5
Tox lo power
2.2
2.1
1.6
1.4
1.1
1.0
0.9
Gate oxide
Oxynitride
HfOx; Si,N
LaAlO3
Gate metal
Poly Si
Metal gate, e.g. TaSiNx

Figure 2062 shows the scaling of feature size, gate length and oxide thickness of complementary metal oxide semiconductor (CMOS) field effect transistor (FET) made from silicon according to the 2003 International Technology Roadmap for Semiconductors.

Scaling of feature size, gate length and oxide thickness of CMOS-FET

Figure 2062. Scaling of feature size, gate length and oxide thickness of CMOS-FET according to the 2003 International Technology Roadmap for Semiconductors.