Comparison between CBED and EBSD
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Kikuchi patterns in both EBSD and CBED present similar geometry and can be successfully calculated using a Bloch-wave approach. In these calculations, the EBSD patterns are considered to be formed by independent internal sources emitting divergent electron waves from the crystal [1], while CBED patterns are considered to be formed by an external convergent probe. The intensity distributions in the Kikuchi patterns for the two cases are qualitatively different because CBED Kikuchi patterns are ideally formed by only those electrons which retain a specific phase with respect to the incident beam, while the EBSD Kikuchi patterns are formed by independent sources largely incoherent with respect to the primary beam. Table 2341 lists some comparisons between CBED and EBSD.

Table 2341. Comparison between CBED and EBSD.

System installed In TEM In SEM
Spatial resolution 5 - 100 nm 100 - 500 nm
Depth for image ~100 nm 10 - 20 nm
Orientaion accuracy 0.1° - 0.2° 0.5° - 1°
Specimen preparation Difficult Relatively easy
Sampling area Thin foil Entire surface





[1] Cowley, J.M. (1995) Diffraction Physics. 3 edn. North-Holland, Amsterdam.




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