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Detection of High Energy X-rays in EDS - Practical Electron Microscopy and Database - - An Online Book - |
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| Microanalysis | EM Book https://www.globalsino.com/EM/ | ||||||||
| This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers. | ||||||||
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The sensitivity of X-ray detection drops off at the high-energy end (Figure 2357), for instance, at energies greater than 20 keV, the Si (Li) crystal (typically 3-5 mm thick) becomes transparent. This is not important in an SEM operated at 30 keV because high-energy X rays is not excited. But in a TEM operated at high voltages (e.g. ≥ 100 keV), the ability to detect hard X rays would be severely limited.
Figure 2357. Comparison between the detection efficiencies of Si(Li) and SDD detectors. Note that Ge-based EDS detectors are able to detect very high energy X rays, e.g. gold (Au) Kα (69 keV).
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| The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page. | ||||||||
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