Electron microscopy
Detection of High Energy X-rays in EDS
- Practical Electron Microscopy and Database -
- An Online Book -
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


The sensitivity of X-ray detection drops off at the high-energy end (Figure 2357), for instance, at energies greater than 20 keV, the Si (Li) crystal (typically 3-5 mm thick) becomes transparent. This is not important in an SEM operated at 30 keV because high-energy X rays is not excited. But in a TEM operated at high voltages (e.g. ≥ 100 keV), the ability to detect hard X rays would be severely limited.

Detection Efficiency of Si(Li) and SDD EDS Detectors

Figure 2357. Comparison between the detection efficiencies of Si(Li) and SDD detectors.

Note that Ge-based EDS detectors are able to detect very high energy X rays, e.g. gold (Au) Kα (69 keV).



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