Chemical Vapor Deposition (CVD)
- Practical Electron Microscopy and Database -
- An Online Book -
https://www.globalsino.com/EM/ |
This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
=================================================================================
Table 2387. Comparison of different CVD techniques applied in microfabrication processes.
*Note: APCVD: atmospheric CVD; PECVD: plasma enhanced (assisted) CVD; LTLPCVD: low-temperature low-pressure CVD; MTLPCVD: medium temperature low pressure CVD; UHVCVD: ultrahigh vacuum CVD; AACVD: aerosol assisted CVD; DLICVD: direct liquid injection CVD; MPCVD: microwave plasma-assisted CVD; ALCVD: atomic-layer CVD. |
=================================================================================
The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.