Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Practical Beam Current of FIB Technique

Figure 2422 shows the dependence of FIB resolution on beam current. The resolution is higher when the current is lower. Lower ion currents are used to achieve finer resolution during milling. Such low currents are useful for precise, detailed work but may result in slower material removal rates. On the other hand, higher currents lead to faster material removal but at the expense of resolution. This approach is suitable for applications where rapid milling is prioritized over fine detail.

Dependence of FIB resolution on beam current

Figure 2422. Dependence of FIB resolution on beam current.