Alkaline Hydroxide
- Practical Electron Microscopy and Database -
- An Online Book -  

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Table 2439. Etchants used in semiconductor manufacturing.

SiO2(Silicon oxide)
Dilute hydrofluoric acid (DHF)
Buffered HF (BHF)
Alkaline hydroxide + organic
Si3N4(silicon nitride)-selective to SiO2
Boiling phosphoric acid (H3PO4)
Si3N4/SiO2 (non-selective)
Hydrofluoric acid + organic





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