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Etchants Used in Semiconductor Manufacturing
- Practical Electron Microscopy and Database -
- An Online Book -
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https://www.globalsino.com/EM/
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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Table 2441. Etchants used in semiconductor manufacturing.
Film |
Etchant |
SiO2(Silicon oxide) |
Dilute hydrofluoric acid (DHF) |
Buffered HF (BHF) |
Polysilicon |
Alkaline hydroxide + organic |
Si3N4(silicon nitride)-selective to SiO2 |
Boiling phosphoric acid (H3PO4) |
Si3N4/SiO2 (non-selective) |
Hydrofluoric acid + organic |
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The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.
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