Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Etchants Used in Semiconductor Manufacturing

Table 2441. Etchants used in semiconductor manufacturing. See more details at etchants used in semiconductor manufacturing and their etching rates. Film Etchant SiO2(Silicon oxide) Dilute hydrofluoric acid (DHF) Buffered HF (BHF) Polysilicon Alkaline hydroxide + organic Si3N4(silicon nitride)-selective to SiO2 Boiling phosphoric acid (H3PO4) Si3N4/SiO2 (non-selective) Hydrofluoric acid + organic