Chapter/Index: Introduction | A |
B |
C |
D |
E |
F |
G |
H |
I |
J |
K |
L |
M |
N |
O |
P |
Q |
R |
S |
T |
U |
V |
W |
X |
Y |
Z |
Appendix
Quality of Epitaxial Layers
| Table 2491 defines the quality of epitaxial layers grown on a substrate.
Table 2491. Quality of epitaxial layers grown on a substrate.
Epitaxial status |
Quality |
Random molecules |
Essentially amorphous structure with weak interlinking
between molecules, possibly with some ordering |
Amorphous extended lattice |
Similar strength interatomic bonds but no great length scale
correlation |
Nearly perfect polycrystalline |
Random orientated crystallites with similar size and shape |
Textured polycrystalline |
Crystallites preferentially orientated normal to the
surface, but randomly orientated in the plane with
a size distribution |
Textured epitaxial |
The layer orientation is close to registry with the
underlayer, both normal and parallel to the surface
plane. The layer is composed of mosaic blocks. |
Nearly perfect epitaxial |
A single extended crystal having near perfect registry
with the same orientation as the underlayer |
|
