EELS & EFTEM Measurements in Aberration Corrected TEMs
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Spherical aberration correction in EMs can induce a probe-current-density increase by a factor of 4 to 9. Not only will this enhance the signal-to-noise ratio of STEM images but also the signals for analytical electron microscopy, for instance, energy-dispersive X-ray spectroscopy (EDX) and electron energy-loss spectroscopy (EELS).

Table 2588. Examples of collection angles of EELS measurement in different microscope conditions.

Accelerating voltage STEM Beam current Probe size Collection angle Aberration corrector reference
200 keV CFEG 7 pA 0.12 nm 31 mrad No corrector [1]
100-200 pA   15-25 mrad Cs-corrected [1]
780 pA     Cs/C5--corrected [1]











[1] Peter W. Hawkes, Advances in Imaging and Electron Physics: Aberration-corrected Electron Microscopy, Volume 153, 2008.