Emission Microscopy (EMMI) for Failure Analysis in ICs
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Even though light emission microscopy (EMMI) is widely used in many failure analyses in the field of integrated circuits (ICs). However, in some cases, the defects in complex circuits are not able to emit the light emission, or the defect has infrared (IR) emission. In those cases, the EMMI is not helpful.




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