Leakage Current in Gate Oxide of MOS
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Due to the continuous scaling of CMOS, the thickness of the SiO2 layer used as the gate dielectric is so thin (under 1.4 nm) that the gate leakage current due to the direct tunnelling of electrons through the SiO2 layer becomes too high (exceeding the maximum tolerable gate leakage current 1 Acm−2 at 1V) as shown in Figure 2914, therefore, the power dissipation dramatically increases to unacceptable values [1–6]. On the other hand, the reliability of the SiO2 films against electrical breakdown declines in the thin films.

IG–VG characteristics (leakage current) under inversion conditions of nMOSFETs

Figure 2914. Measured and simulated IG–VG characteristics (leakage current), with gate SiO2 layers in different thicknesses, under inversion conditions of nMOSFETs. The dotted line indicates the maximum tolerable gate leakage current would be of the order of 1 A/cm for a power supply of 1 V. Adapted from [7]




[1] Wilk G, Wallace R M, Anthony J M, 2001 J. Appl. Phys. 89 5243
[2] Wallace R M and Wilk G D 2003 Crit. Rev. Solid State Mater. Sci. 28 231
[3] Robertson J 2004 Eur. Phys. J. Appl. Phys. 28 265
[4] Huff H and Gilmer D (ed) 2004 High K gate Dielectrics (Berlin: Springer)
[5] Houssa M (ed) 2003 High Dielectric Constant Materials: VLSI MOSFET Applications (London: IOP)
[6] Demkov A A and Navrotsky A (ed) 2005 Materials Fundamentals of Gate Oxides (Dordrecht: Springer)
[7] Lo S. H., Buchanan D. A., Taur Y. and Wang W., Quantum-Mechanical Modeling of Electron Tunneling Current from the Inversion Layer of Ultra-Thin-Oxide nMOSFET’s, (1997) IEEE Electron Device Lett. 18 209.




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