Electron microscopy
Damage of EDS Detectors
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   https://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Problems can occur on windowless EDS detectors as follows:
        i) When a windowless detector is used in a TEM with an accelerating voltage ≥ 200 keV, the detector can be damaged by backscattered electrons from the TEM specimen.
        ii) When the column of a TEM is exposed to air, a detector shutter is normally closed in advance so that the pressure in the detector does not become atmospheric pressure. Otherwise, frost can form on the surface of the detector, resulting in degradation of EDS measurement. These frost can also originate from moistures brought into the detector during specimen changing.



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