Spatial Resolution of EFTEM Mapping
Affected by Energy Range
- Practical Electron Microscopy and Database -
- An Online Book - 

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


In EFTEM mapping, the spatial resolution depends on the chromatic broadening (Δdc) in the objective lens. Chromatic broadening is determined by the energy range (ΔE), the chromatic aberration coefficient of the objective lens Cc, the accelerating voltage V0, and the collection angle (β),

         Chromatic broadening  in PEELS ----------------------- (3383)

For instance, the chromatic broadening (Δdc) is about 2.5 nm at β = 10 mrad, Cc = 1 mm, ΔE = 50 eV, and V0 = 200 keV. This broadening disadvantage does not exist in conventional STEM-based EELS. To minimize it, a small collection angle can be used.




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