In general, angular distribution of scattered electrons is more conveniently
described in reciprocal space. The inelastic scattering of electrons occurs at smaller angles than that for elastic scattering. Figure 3819a shows angular distributions of various scattered electrons as a function of scattering angle in EMs.
|Figure 3819a. (a) Elastic scattering of electrons with crystalline and amorphous specimens, (b) Phonon scattering, (c) Inner-shell ionization losses, and (d) Plasmon losses.
Figure 3819b shows an example of angular-resolved electron scattering profiles in logarithmic scale. The reference spectrum (vacuum) in blue is dominated by unscattered electrons in the range −4 to 4 mrad. Due to the scattering of the incident electrons with a rhenium (Re) TEM specimen, the modified spectrum in red was formed.
|Figure 3819b. An example of angular-resolved electron scattering profiles of electrons in vacuum and Re film in logarithmic scale.
 Konstantin Iakoubovskii and Kazutaka Mitsuishi, Elastic scattering of 200 keV electrons in elemental solids: experimental observation of atomic-number-dependent oscillatory behavior, J. Phys.: Condens. Matter 21 (2009) 155402.