This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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Passive voltage contrast (PVC) method for failure localization on semiconductor circuits is based on contrast differences in FIB or SEM images of more or less electrically conducting structures in the circuits [1–7]. “Passive” is named because the IC die does connect to any power supply or signal sources. Therefore, failure localization with PVC is based on the fact that the floating conductive structure is charged up under the irradiation of the primary beam in FIB and SEM.
[1] J. Colvin, in Proceedings of the 16th International Symposium on
Testing and Failure Analysis. A new technique to rapidly identify
low level gate oxide leakage in field effect semiconductors using
a scanning electron microscope, vol 331 (1990)
[2] N. Nishikawa, N. Kato, Y. Kohno, N. Miura, N. Shimizu, in
ISTFA 1999 Proceedings. An application of passive voltage
contrast (PVC) to failure analysis of CMOS LSI using secondary
electron collection (1999), pp. 239–243
[3] C. Yuan, S. Li, A, ISTFA 2005 Proceedings. Gray method of
failure site isolation for flash memory device using FIB passive
voltage contrast techniques (2005), pp. 202–205
[4] C.M. Shen, S.C. Lin, C.M. Huang, H.X. Lin, C.H. Wang, ISTFA
2005 Proceedings. Couple passive voltage contrast with scanning
probe microscope to identify invisible implant issue (2005),
pp. 212–216
[5] T. Sakai, N. Oda, T. Yokoyama, in IEEE International Symposium
1999. Defect isolation and characterization in contact arraychain
structures by using voltage contrast effect (1999)
[6] J. C. Lee, C. H. Chen, D. Su, J.H. Chuang, in ESREF 2002.
Investigation of sensitivity improvement on passive voltage
contrast for defect isolation (2002)
[7] R. Rosenkranz, in 8th European FIB User Group Meeting 2004.
FIB voltage contrast for failure localization on CMOS circuits -
an overview (2004)
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