Practical Electron Microscopy and Database

The energy resolution of a conventional EEL spectrometer is usually limited by geometric aberration. Curved entrance and exit edges of the magnetic prism spectrometer are usually made to appropriate radii to correct geometric aberration [1 - 2], for instance, curved entrance was used to design a TEM postcolumn imaging filter.[3] However, the performance of curved edge depends highly on the machining tolerances and alignment accuracy [4–6].

[1] R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd ed. (Plenum, New York, 1996), pp. 63–68.
[2] J. R. Fields, Ultramicroscopy 2, 311 (1977).
[3] O. L. Krivanek, A. J. Gubbens, N. Dellby, and C. E. Meyer, Microsc. Microanal. Microstruct. 3, 187 (1992).
[4] R. F. Egerton, Optik 57, 229 (1987).
[5] T. T. Tang, Scan Electron Microsc. 1, 39 (1982).
[6] M. Sheinfein and M. Isaacson, Scan Electron Microsc. 4, 1681 (1984).