Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Ultrathin Specimen Preparation by Low-Energy Ar-Ion Milling

Low-energy Ar-ion milling, typically 500–900 eV, has been used to prepare ultrathin TEM specimens. [1] However, those specimens normally are thinned initially by FIB technique and/or high energy Ar-ion milling, e.g. 2–10 keV.             [1] Masanori Mitome, Ultrathin specimen preparation by a low-energy Ar-ion milling method, Journal of Electron Microscopy 0(0): 1–6 (2012).