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Considering commercial equipments, the prices of various EMs differs widely. In general, the costs of the instrument and maintenance are roughly in proportion to the maximum operating voltage of the same type of EMs. For instance, lower voltage TEMs have the advantage of reducing overall cost. Table 4380 lists the ranges of the prices of some tools or functions.
Table 4380. Ranges of the prices of some tools or functions.
Tool/part |
Price |
Application examples |
Year quoted |
FIB
milling |
$ 0.5~2 million |
|
|
e-beam writer |
$ 2.5~6 million |
|
|
Laser writer |
$ 0.5~1 million |
|
|
Toshiba 1600XP/1600XPi Uninterruptible Power System (UPS) |
$ 8,000 |
FEI and JEOL TEMs |
2015 |
TEM |
$ 1~4 million: E.g. $ 1 million for a JEOL 1200EXII, a Philips EM10, or a Hitachi 7000, and $ 4 million for a JEOL ARM 200F |
|
Schottky type emitter |
A cheaper way to replace a broken tip is to refurbish the old tip by replacing W needle with Zr coating |
|
In general, FIB milling cost is about $300/hour, including the labor expense.
|
