Vacuum Contamination in EMs
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



The partial pressure of hydrocarbon (HC) or silicon oils from the diffusion pump, the grease of vacuum seals, and fingerprints on TEM sample holder induce HC contamination in the EMs (electron microscopes) specimen chamber.

The resolution of electron microscopes (EMs) is partially limited by: i) The electrical stability of the EM systems, e.g. the stabilities of the high voltage and the lens currents; ii) External disturbances e.g. mechanical vibration, contamination, charging, fluctuation of stray magnetic fields, and the nonuniform magnetic properties of the pole-piece material used.



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