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The experimental conditions for FIB specimen preparation vary from lab to lab mostly depending on the habit and application of the FIB users. An examples is shown in Table 4500. The most critical parameters are the parameters at the final cleaning steps. Especially, to obtain clean samples, low kV such as 8 kV, 5 kV, and/or 2 kV should be carried out at the final steps [1].

Table 4500. Experimental conditions used for the preparation of the TEM specimens [2]

[1] High-Quality Sample Preparation by Low kV FIB Thinning for Analytical TEM Measurements, Sara Bals, Wim Tirry, Remco Geurts, Zhiqing Yang, and Dominique Schryvers, Microsc. Microanal. 13, 80–86, (2007).
[2] Evaluation of Top, Angle, and Side Cleaned FIB Samples for TEM Analysis, Eduardo Montoya, Sara Bals, Marta D. Rossell, Dominique Schryvers, and Gustaaf Van Tendeloo, Microscopy Research and Technique 70:1060–1071 (2007).