Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Maximum X-ray Escape Range/Depth

Table 4593 lists some examples of maximum emission depths of X-rays at different accelerating voltages in EDS measurements. Table 4593. Examples of maximum emission depths of X-rays. Accelerating voltage Emission depth Measured X-rays Materials 15 kV 1 µm Ti Kα (4.508 keV) and TiKβ (4.931 keV) Ti0.46N0.54 At low voltages the X-ray escape range is reduced sufficiently for the O(K) x-ray signal to avoid the matrix absorption prevalent at high voltages.