Maximum X-ray Escape Range/Depth
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Table 4593 lists some examples of maximum emission depths of X-rays at different accelerating voltages in EDS measurements.

Table 4593. Examples of maximum emission depths of X-rays.

Accelerating voltage
Emission depth
Measured X-rays
15 kV 1 µm Ti Kα (4.508 keV) and TiKβ (4.931 keV) Ti0.46N0.54

At low voltages the X-ray escape range is reduced sufficiently for the O(K) x-ray signal to avoid the matrix absorption prevalent at high voltages.