Electron microscopy
 
Low voltage energy dispersive spectroscopy (LVEDS) or low-energy X-ray emission spectroscopy (LEXES)
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

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At low accelerating voltages (e.g. <5 keV), the EDS technique is sometimes called low voltage energy dispersive spectroscopy (LVEDS) or low-energy X-ray emission spectroscopy (LEXES). This technique is finding increasing applications in biological science.

For low-energy EDS measurements of heavy elements in bulk materials, the spatial resolution can be enhanced if the X-ray lines of a proper low-excitation energy are used. With an accelerating voltage of 5 kV, the K line is available only for atomic numbers below 20, above which L lines is needed, and M lines must be used for atomic numbers above 42. This application of low energy X-ray lines sacrifice the efficiency of X-ray generation and is subject to chemical bonding effects.

 

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