Spray & Beam Defining Apertures in FIB
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Table 2466. The function of each part in the FIB.

Ion source
Improves the distribution of extracted ions
High tension used for ion extraction: Typical accelerating voltage in FIB systems ranges from 1 to 30 keV
Spray aperture
First refinement
1st lens (condenser lens)
Parallelize the ion beam: probe forming
Upper octopole
Beam defining aperture
Defines current: A set of apertures define the probe size and provides a range of ion currents (10 pA – 30 nA)
Blanking deflector
Beam blanking: Beam blankers are used to deflect the beam away from the centre of the column
Blanking aperture
Beam blanking
Lower octopole
Raster scanning
2nd lens (objective lens)
Beam focusing





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