Spray & Beam Defining Apertures in FIB
- Practical Electron Microscopy and Database -
- An Online Book -

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Table 2466. The function of each part in the FIB.

Part
Function
LMIS
Ion source
Suppressor
Improves the distribution of extracted ions
Extractor
High tension used for ion extraction: Typical accelerating voltage in FIB systems ranges from 1 to 30 keV
Spray aperture
First refinement
1st lens (condenser lens)
Parallelize the ion beam: probe forming
Upper octopole
Stigmator
Beam defining aperture
Defines current: A set of apertures define the probe size and provides a range of ion currents (10 pA – 30 nA)
Blanking deflector
Beam blanking: Beam blankers are used to deflect the beam away from the centre of the column
Blanking aperture
Beam blanking
Lower octopole
Raster scanning
2nd lens (objective lens)
Beam focusing

 

 

 

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