Resolution of FIB Milling
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 
This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

=================================================================================

The resolution of FIB milling can be given by,
         resolution of FIB milling ------------------- [2477a]
where,
          M -- The magnification.
          dq -- The virtual source diameter.
          ds -- The spherical aberration.
          dc -- The chromatic aberration.

The spherical aberration and chromatic aberration are given by,
         resolution of FIB milling ------------------- [2477b]
         resolution of FIB milling ------------------- [2477c]
where,
          α -- The convergence half-angle.

The convergence half-angle is determined by,
         resolution of FIB milling ------------------- [2477d]

At low beam currents, the resolution is mainly determined by the size of the emission area on the probe. At medium currents, the resolution is mostly affected by the chromatic aberration. However, at high currents, the resolution is mainly controlled by the spherical aberration.

Figure 2477 shows the dependence of FIB resolution on beam current. The resolution is higher when the current is lower.

Dependence of FIB resolution on beam current

Figure 2477. Dependence of FIB resolution on beam current.

It is well-known that the damage may be reduced with the use of lower-energy ion beam in FIB milling but this also induces a degradation of spatial resolution. This resolution behavior is especially important when we are patterning in nanoscale.

 

 

=================================================================================

The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.