Lateral Ranges of Probe Ions in FIB and SIMS Measurements - Practical Electron Microscopy and Database - - An Online Book - |
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Microanalysis | EM Book http://www.globalsino.com/EM/ | ||||||||||||||||
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Lateral resolution of FIB is determined by two factors: Table 1173. Estimated lateral ranges of ions.
[1] Lucille A. Giannuzzi and Fred A. Stevie, INTRODUCTION TO FOCUSED ION BEAMS: Instrumentation, Theory, Techniques and Practice, 2005.
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