Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Lateral Ranges of Probe Ions in FIB and SIMS Measurements

Lateral resolution of FIB is determined by two factors:          i) the smallest ion probe achievable in a given FIB,          ii) the lateral range of probe ions in the material. Table 1173. Estimated lateral ranges of ions. Sample material Lateral range (nm) Ion beam Reference Al 7 30 keV Ga [1] Ti 7 30 keV Ga [1] Si 3 30 keV Ga [1]               [1] Lucille A. Giannuzzi and Fred A. Stevie, INTRODUCTION TO FOCUSED ION BEAMS: Instrumentation, Theory, Techniques and Practice, 2005.