Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Table of Contents/Index

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

P (primitive) lattices & their space groups  
Triclinic
P1 (1) P-1 (2)
Monoclinic
P2 (3) P21 (4)
Pm (6) Pc (7)
P2/m (10) P21/m (11)
P2/c (13) P21/c (14)
P21/n
Orthorhombic
P222 (16) P2221 (17)
P21212 (18) P212121 (19)
Pmm2 (25) Pmc21 (26)
Pcc2 (27) Pma2 (Pbm2, 28)
Pca21 (Pbc21, P21ab, 29) Pnc2 (30)
Pmn21 (31) Pba2 (32)
Pna21 (P21cn, 33) Pnn2 (34)
Pmmm (47) Pnnn (48)
Pccm (49) Pban (50)
Pmma (51) Pnna (52)
Pmna (53) Pcca (54)
Pbam (55) Pccn (56)
Pbcm (57) Pnnm (58)
Pmmn (59) Pbcn (60)
Pbca (61) Pnma/Pbnm (62)
Tetragonal
P4 (75) P41 (76)
P42 (77) P43 (78)
P-4 (81) P4/m (83)
P42/m (84) P4/n (85)
P42/n (86) P422 (89)
P4212 (90) P4122 (91)
P41212 (92) P4222 (93)
P42212 (94) P4322 (95)
P43212 (96) P4mm (99)
P4bm (100) P42cm (101)
P42nm (102) P4cc (103)
P4nc (104) P42mc (105)
P42bc (106) P-42m (111)
P-42c (112) P-421m (113)
P-421c (114) P-4m2 (115)
P-4c2 (116) P-4b2 (117)
P-4n2 (118) P4/mmm (123)
P4/mcc (124) P4/nbm (125)
P4/nnc (126) P4/mbm (127)
P4/mnc (128) P4/nmm (129)
P4/ncc (130) P42/mmc (131)
P42/mcm (132) P42/nbc (133)
P42/nnm (134) P42/mbc (135)
P42/mnm (136) P42/nmc (137)
P42/ncm (138)
Trigonal
P3 (143) P31 (144)
P32 (145) P-3 (147)
P312 (149) P321 (150)
P3112 (151) P3121 (152)
P3212 (153) P3221 (154)
P3m1 (156) P31m (157)
P3c1 (158) P31c (159)
P-31m (162) P-31c (163)
P-3m1 (164) P-3c1 (165)
Hexagonal
P6 (168) P61 (169)
P65 (170) P62 (171)
P64 (172) P63 (173)
P-6 (174) P6/m (175)
P63/m (176) P622 (177)
P6122 (178) P6522 (179)
P6222 (180) P6422 (181)
P6322 (182) P6mm (183)
P6cc (184) P63cm (185)
P63mc (186) P-6m2 (187)
P-6c2 (188) P-62m (189)
P-62c (190) P6/mmm
P6/mcc (192) P63/mcm (193)
P63/mmc (194) P6m2
Cubic
P23 (195) P213 (198)
Pm-3 (200) Pn-3 (201)
Pa-3 (205) P432 (207)
P4232 (208) P4332 (212)
P4132 (213) P-43m (215)
P-43n (218) Pm-3m (221)
Pn-3n (222) Pm-3n (223)
Pn-3m (224)
Others
P105/mmc Pm-35
Comparison between Space Group P1 and Space Group Irnmm
p-i-n structures
Applications of p-i-n structures in EM-related devices
p-n junction
Built-in potential in p-n junction PVC of pn-junction structures/diodes
p-well contacts and p-contacts in ICs
PVC of p-well contacts in ICs PVC of n-contacts in p-well in ICs
PVC of p-contacts in n-well in ICs
Packaging
IC failure induced during wafer packaging and shipping
Packing density in some crystal planes Packing factor (atomic) in crystals
Pair correlation function (PCF) Pair Distribution Function (PDF) analysis
Palladium (Pd)
EELS measurement of palladium (Pd) EDS measurement of palladium (Pd)
SEM and STEM observation of Pd (Palladium) particles Palladium in ICs
Pd-based metallic-glass alloys Palladium oxide (PdO)
Parabaloid method for image series reconstruction with TEM Parallax (film thickness) measurements
Parallel illumination in TEM Parallel: Comparison of microscope conditions with parallel and convergent beams
Paramagnetic materials Parallel EELS spectrometer (PEELS)
Parasitic aberrations in multipole corrector optics Paraxial ray focus
Paraxial rays (electrons) in EMs Partial coherence of electron source
Partial density of states (PDOS) Partial cross-sections for inner-shell ionization
Partial, total and integral cross-sections for inner-shell ionization
Particle & Nanoparticle
EDS artifact of measurement on (nano-) particles Requirements and preparation of nano-particles TEM samples
SEM and STEM observation of Pd (Palladium) particles Wave-particle duality
Killer particles causing IC failure Particle analysis with DM and scripts
Requirements and preparation of nano-particles TEM samples
Passive voltage contrast (PVC) in FIB and SEM
Positive charging case of PVC in FIB and SEM Artifacts in PVC in FIB and SEM
Advanced mechanisms of PVC contrast Negative charging case of PVC in SEM
Short failure in IC devices detected by PVC PVC of pn-junction structures/diodes
PVC of gate contacts PVC of n-well contacts in ICs
PVC of p-well contacts in ICs PVC of n-contacts in p-well in ICs
PVC of p-contacts in n-well in ICs Equivalent circuit diagram of PVC in FIB and SEM
Dependence of PVC generation on area and/or volume of connected conducting materials PVC of transistors
PVC of capacitors Optimized conditions for PVC observations
Patches
Dark patches
Pattern center determination in EBSD Patterson method
Quartz PCI-AM (Passive Capture Interface - Automated Measurement)  
Patterson space group Pauli exclusion principle
Automatically indexing TEM electron diffraction patterns using machine learning
PC/remote application in EMs  
Computer- & remote-control on electron microscopes Data acquisition and analysis using PC in EMs
Peak-detector/peak-stretcher in EDS systems Peak pile-up continuum in x-ray/EDS profiles
Peak broadenings in EELS
Core-loss peak broadening in EELS Broadening of EELS zero-loss peak due to phonon scattering
Peak-to-background ratios
Peak-to-background ratio in EELS
Peak splitting in XRD profiles Peak identification in EDS measurements
Pearson symbols Peltier thermoelectric cooling
Peltier mechanical cooling Pendellösung/Pendellosung fringes in crystals
Penetration/diffusion of elements through grain boundaries Penetration depth of energetic incident electrons in materials
Penetration depth of a laser into materials  
Penning gauge/(cold cathode) ionization gauge Pentagonal Penrose tiling
Perfect dislocations Perfect/ideal lenses in EMs
(Peripheral Component Interconnect) PCI based firewire card
Peripheral electrons removed by objective aperture Peripheral electrons emitted from electron guns
Periodic/step features in HRTEM images 
HCP Structure at Grain Boundaries in FCC Materials 9R structure at grain boundaries in FCC materials
Periodic Table
Periodic table for analytical TEM (EDS/EELS) analysis Periodic table for EELS analysis
Periodic table for EDS analysis Atomic Weight of Elements in Periodic Table
Most Common Crystal Structure of Elements in Periodic Table Alkali metals, Halogens, Transition metals, and Noble Gases in Periodic table
Metals, Metalloids, and Nonmetals in periodic table Periodic table of X-ray absorption edges
Periodic table for electron affinity Periodic table for atomic & ionic radii and valence states of elements
Abundance in Earth's Crust of the elements Periodic table for SIMS measurement
Digital Micrograph script to create a periodic table
Permittivity of materials
Perovskite structures
Double perovskite crystalline structures HRTEM imaging of perovskite structures
Goldschmidt tolerance factor CaTiO3
Extra electron diffraction spots from perovskite crystalline structures [100] zone axis of perovskite structures
Perovskite-like ferroelectrics
LaMnO3 Bipolar resistive switching in perovskite insulators
 Phase in EMs
Phase of Fourier components in HRTEM images Phase shift of electrons induced by objective lens
Phase-contrast in TEM images Phase correlation function (PCF)
Phase shift from defocus and spherical aberration Geometrical Phase Analysis (GPA)
Minimum (phase-)contrast in (HR)TEM imaging with Gaussian defocus Maximum (phase-)contrast in (HR)TEM imaging (with Scherzer defocus)
Phase object approximation (POA)  Phase contrast transfer function/phase distortion function 
Phase extension procedure Phase-contrast microscopy
Phase shift of incident electrons induced by TEM specimen Phase shift of electrons depending on scattering angle in TEM/STEM
Scherzer phase plate Beam convergence angle/coherence effects on phase shift
Phase-plate electron microscope/TEM with phase-plate
Zernike-type phase plate for TEMs Hilbert-type phase plates for TEMs
Phase of materials
Phase identification with XRD and its procedure Crystalline phase analysis by EELS and its plasmon
Phase separation in metallic glasses Indexing of crystal structures
Phase-induced splitting of reflections in electron diffraction patterns
Phase transition of materials
First-order phase transitions First-order ferroelectric phase transitions
Second-order phase transitions Shuffle transformation
Phase change optical storage media Rewritable phase-change optical memory disks
Diffusionless phase transformation Driving force for the phase transition in materials
Martensitic transformation Phase transitions inducing ferroelectricity
 Phonon excitation by electrons in EMs
Vibration of atoms/phonon
Phonon excitation and thermal diffuse scattering (TDS) of electrons in EMs Phonons formed in EMs versus heating
Phonon effect on electron diffraction patterns Phonon effect on TEM imaging
Responding time of phonon emission for electron irradiation Broadening of EELS zero-loss peak due to phonon scattering
 Phonon-electron scattering
Broadening of diffraction peak & phonon-electron scattering Debye phonon model
Phosphorus (P)
EDS measurements of phosphorus (P) EELS measurements of phosphorus (P)
AlGaInP Compound semiconductor
Phosphoric acid (H3PO4) Ni5P2
Phosphine (PH3) P-based metallic-glass alloys
Phosphor used in electron spectrum detectors/cameras   CCD sensors/detectors with phosphor and fiber-optic coupling
Photodiode array (PDA) for EELS  Photo-diode array (PDA) detectors
Photoelectrons Photographic plate/photo-film for image recording in EMs
 Photomultiplier (PM) 
Scintillator-photomultiplier (PM) system 
 Photons
Responding time of photon emission for electron irradiation Energy/wavelength of X-ray "particles" (photons)
Photonic technology
Photovoltaic 
Photovoltaic devices
Techniques of physical failure analysis (PFA) for ICs
Physical gate length
Physical and chemical constants, and unit conversion Picoammeter
Pi (π) bonds
 Piezo
Piezo-controlled energy-selecting slit in EELS device & GIF camera  Piezoelectric materials
Piezoresponse atomic-force microscopy (PFM) Piezo drive TEM/STEM holders
Pinhole lens for objective lens in SEMs Pirani gauge
Pipes used in EMs Poisson distribution (statistics)
Pivot point/rocking point/tilt & shift and their purities in TEM  Pixel in digital imaging cameras
CMOS Monolithic Active Pixel Sensors (MAPS) direct electron detectors Hybrid Pixel Array Detector (PAD): A direct electron detector
Pixel resolution for recording CBED patterns Pixel size in EM imaging
Planes in lattice systems of crystals
 A-, M-, R-, and C-planes of sapphire crystal Cleavage plane of crystals
Close packed planes and directions in crystals Determination of Miller indices of planes
Plane wave of electron beam
Plane wave and interference pattern in electron holography Excitation coefficient for plane wave incidence
Diffraction of plane wave from multiple point sources
EM sample preparation of SiC (Silicon Carbide) materials
 Plasma
Plasma cleaning and plasma cleaners used for EM sample cleaning Plasma cleaning of FIB prepared specimens
Cleaning of hydrocarbon contamination by oxygen radicals in EMs
 Plasmon (plasma oscillation/plasma resonance)
Applications of plasmon mode in EELS for nanostructures Plasmon peaks from thick TEM samples
Table of surface & bulk plasmon energy in EELS Plasmon measurement in EELS
Surface & bulk plasmon energy in EELS Crystalline phase analysis by EELS plasmon
Plasmon mean free path Surface plasmons formed in thin specimen in EMs
Maximum intensity of plasmon energy loss peak Interband plasmon peak energy
Plasmon signal affected by core-loss transitions in EELS Number of valence electrons involved in plasmon scattering
Analysis of surface plasmon resonances affected by energy resolution Cross section of plasmon scattering
Sample thickness determination using EELS/FETEM Origin of change of plasmon energy
Plastic deformation
Plastic deformation of metallic glasses
Free volume change in amorphous materials induced by deformation
 Platinum
EDS measurement of platinum (Pt) EELS measurement of Platinum (Pt)
Platinum Deposition by FIB Amorphization of STO induced by e-beam Pt deposition
FePt alloys Platinum in ICs
PtSi in ICs Pt-based metallic-glass alloys
Plural/multiple scattering of electrons Pneumatic apertures
Pnicogen 
Intermetallic compounds between 3d transition metal and pnicogen
Point ROI on Gatan DigitalMicrograph
Point
Number of lattice points (atoms) per unit cell Point resolution in EMs
Point-spread and its function  Lattice point/motif/basis
Point defects 
Detection of point defects Saturation of point defects
Voids generated during TEM sample preparation Point defects created in FIB-EM sample preparation
Frenkel pair  
Atomic point defects Electronic point defects
Point defects (vacancy & interstitial) generated in Ar-milling
Point groups/symmetries (32) (Space group)
Holohedral point groups Merohedral point groups
Crystallographic point group notations/description Determination of point group
Determination of point groups of cubic systems Point groups of crystals of biological macromolecules
Polar point groups for ferroelectricity Relationship between diffraction group and point group
Crystal structure
Point group
Triclinic 1
-1
Monoclinic 2
m 2/m
Orthorhombic 222
mm2 mmm
Tetragonal 4
-4 4/m
422 4mm
-42m 4/mmm
Trigonal 3
-3 32
3m -3m
Hexagonal 6
-6 6/m
622 6mm
Trigonal prismatic: -62m (or D3h) 6/mmm
Cubic 23
m-3 432
-43m m-3m
Others -53m (Point group -53m)
Polar net Polar point groups for ferroelectricity
 Pole (plane normal) in electron stereographic projection
Angle between two planes/plane normals/poles measured by Wulff net
Polepiece 
Nonuniform magnetic properties of pole-piece material Objective polepiece in EMs
Polepiece in magnetic prism of energy filters Upper-/lower-objective polepiece in TEMs
Pole piece gaps in EM systems Effect of configuration of objective polepieces on STEM/TEM spatial resolution
Polycrystalline materials
Electron diffraction patterns of polycrystalline materials Polysilicon and diffused resistors
Polycrystalline silicon in ICs Polycrystalline silicon in solar cells
Polymer
Analytical investigations of polymer TEM specimen grids for EDS analysis
Polymer TEM sample preparation In situ FIB lift-out TEM sample preparation
Polytype layer compounds
Portable/desktop/tabletop SEM Popup windows and input dialogs of scripts for DM
Positive (cathode) & negative (anode) electrode materials for lithium batteries Position effects of TEM sample
  Position of parts in TEM system
Sample location in TEM system Location of EELS spectrometers in TEM system
Position of EDS detector in EMs Position and length of aberration correctors
Post-column energy filters & spectrometers Post-fields of objective lens
Potassium (K) 
EDS measurement of potassium (K) EELS of potassium (K)
K2O·7Nb2O5 crystals Seignette salt/Rochelle salt (NaKC4H4O6•4H2O)
Potassium hydroxide (KOH) etching
Potential
Periodic potential of crystals Effect of periodic potential of crystal on STEM imaging
Fourier coefficients of electrostatic potential
Power
High power devices (of ICs) Low standby power devices
Power spectra of bright-field (BF) TEM micrographs Power-law fit: a background fitting model
 Power supply
Electron-gun high-voltage power supply in EMs Power supplies for quadrupole/octupole aberration correctors
  Precession electron diffraction (PED)
Comparison between conventional electron diffraction and PED, and PED applications Diffraction intensity in precession electron diffraction
Kinematical effects of PED (precession electron diffraction) Dynamical effects of PED (precession electron diffraction)
Precession electron diffraction applications on nanostructures
Precision of measurements Precipitation of transition metals
Precursor gases used in ion-beam/FIB/electron-beam induced depositions
 Preferential phenomena
Preferential electron-beam etching of grain boundaries Preferential destruction of multilayers in FIB milling
Pre-field in EMs
Objective pre-field lens
Pressurized air for EM parts Prewitt edge filter (operator)
Prices of EM and related system and services
 Primary electrons (PE) in EMs
Energy dissipation of primary electrons (PE) in materials Maximum ranges of primary electron beam in EMs
Dependence of dopant contrast in Si on accelerating voltage of PE
Primitive great circle in electron stereographic projection Primitive (P) lattices
Primitive unit cell determination by electron diffraction
Prisms 
Möllenstedt–Düker biprisms in optical and electron microscopes EELS detector/spectrometers
 Probability
Probability of containing m atoms in a single atom column in crystal Cross section (probabilities) of electron scattering (Introduction: Elastic & Inelastic)
Probes in mechanical, electron and ion systems
Mechanical, electron and ion probe diameters
Probe in EMs
Probe-forming/objective aperture for STEM imaging Lenses for fine probe/beam formation in EMs
Probe-forming aperture in EMs Electron-probe intensity distribution depending on aberrations
Electron-Beam-Probing (eBP) Comparison between Electron-Beam-Probing (eBP) and Laser Voltage Imaging/Probing (LVI/LVP)
Electron Voltage Imaging (EVI) and Electron Voltage Probing (EVP) Clock edge detection via electron beam probing
Wave function of focused probe in STEM/SEM  
Dependence of electron probe/beam current on probe size in EMs Beam/probe size in EMs
Probe current in EMs Probe current density
Probe current measurement with Faraday cage in EMs Measurement of electron probe current with EELS spectrometer
Probe current affected by aberration corrections Measurement of probe current
Evaluation of probe size in EMs Probe diameter in EMs
Procedures
Phase identification procedure by CBED CBED Operation Procedure
Probe-forming Cs-corrector
Processing
EM image processing and deconvolution TEM image formation process
Processes and mechanisms of secondary electron generation Profile analysis in integrated circuits (IC)  
Profile function on Gatan DigitalMicrograph Program and software examples for EM-related simulations
Projected potential model for TEM specimens Projection-diffraction symmetry
Publication number related to electron microscopes per year
Projector lenses in TEMs/STEMs
Projector lenses & camera lengths in TEMs Projector crossover 
Projector lenses and image/diffraction distortion in EMs Projector Lens Alignment (PLA)
Back focal plane of projector lens in TEM
Properties 
Semiconductor properties Nonuniform magnetic properties of pole-piece material
Propane torch for EMs
Proteins
Electron crystallography of proteins
Proximity effect in lithography
Pseudo-binary systems
Pseudo-binary system Nb2O5/WO3
Pseudo-weak phase-object approximation  
Pulsed electron beam in electron microscopy
Generating a pulsed electron beam using microwave and pulsed RF-based guns in EMs  
Laser-based pulsed electron beam generation for EMs  Beam blanking deflector in EMs and FIB
Generating a pulsed electron beam using field emission with modulated voltage in EMs Generating a pulsed electron beam using an RF-cavity chopped-beam in EMs
Pulsed thermally induced voltage alteration (TIVA)  
Pumping system in EMs 
Comparison between common pumps used in EMs Vacuum range/efficiency & pump combination
Roughing pumps Oil-diffusion Pump
Silicon oils from diffusion pump Sputter ion pump (SIP)
Classification of vacuum pumps
Pumps:  Exhaust pumps
Rotary vacuum pumps Diffusion pumps
Turbo-molecular pump (TMP)
Pumps: Compressive/mechanical pumps
Rotary vacuum pumps Scroll vacuum pumps
Turbo-molecular pump (TMP)
Pumps for high and ultra-high vacuums
Turbomolecular pump Cryopump/cold traps for vacuum & cryogenic (adsorption) pumps
Pumps:  Trapping pumps/Entrainment pumps
Ion getter pumps Cryopump/cold traps for vacuum & cryogenic (adsorption) pumps
Purchase/buy/sale/service of EM systems Purchase/buy/sale/service of TEM systems and acceptance specifications of new systems
Python Pyroelectric materials