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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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In EM measurements, electrons also scatter inelastically with phonons. These energy losses are of the order of a few tens of millielectronvolts (meV) and can therefore not be detected with transmission EELS measurement in an electron microscope. That is, such energy losses induced by crystal vibrations (called phonons) are indistinguishable from elastically scattered electrons. Furthermore, these quasi-elastic scattering processes broaden the zero-loss peak of EELS on the high-energy side.
Table 4347 shows that electrons interact with 1 electron, many electrons, 1 nucleus, and many nuclei in solids.
Table 4347. Effects of interactions of electrons in solids.
| |
Interaction with electron(s) |
Interaction with nucleus/nuclei |
| |
1 electron |
Many electrons |
1 nucleus |
Many nuclei |
| Scattering type |
Inelastic |
Inelastic |
Quasi-elastic |
Elastic |
Inelastic |
| Scattering effect |
Electron Compton effect; electron excitation (from 50 eV to a few keV: EDS and EELS) |
Plasmon excitation (< 50 eV, ~100 nm TEM specimen); Cerenkov effect |
Rutherford scattering; phonon scattering (< 1 eV, heat) |
Bragg scattering |
Bremsstrahlung |
In EM systems, the development of energy-filtered imaging attachments [1 - 5] has allowed removing the intensity from electrons scattered inelastically by any mechanism other than phonon scattering.
[1] T. Honda, T. Tomita, T. Kaneyama, Y. Ishida, Ultramicroscopy
54 (2–4) (1994) 132–144.
[2] O.L. Krivanek, A.J. Gubbens, N. Dellby, C.E. Meyer,
Microsc. Microanal. Microstruct. 3 (1992) 187–199.
[3] K. Tsuno, J. Electron Microsc. 48 (6) (1999) 801–820.
[4] K. Tsuno, T. Kaneyama, T. Honda, Y. Ishida, Nucl.
Instrum. Methods A 427 (1–2) (1999) 187–196.
[5] M. Tanada, K. Tsuda, M. Terauchi, K. Tsuno, T.
Kaneyama, T. Honda, Y. Ishida, J. Microsc. 194 (1999)
219–227.
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