Amorphization of STO Induced by e-beam Pt Deposition
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As shown in Figure 4495, Pt deposition in the FIB system, prior to milling with the Ga beam induced amorphization of STO (SrTiO3) materials, even if the deposition is done by the electron beam (e-beam). The amorphized layer is more than 20 nm thick.

Amorphization of STO induced by e-beam Pt deposition

Figure 4495. Amorphization of STO induced by e-beam Pt deposition [1]

 

[1] Montoya E, Bals S, Rossell MD, Schryvers D, and Tendeloo GV, Evaluation of Top, Angle, and Side Cleaned FIB Samples for TEM Analysis, Microscopy Research and Technique 70:1060–1071 (2007).

 

 

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