Sputter Ion Pump (SIP)
- Practical Electron Microscopy and Database -
- An Online Book -

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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers. You can click How to Cite This Book to cite this book. Please let Dr. Liao know once you have cited this book so that the brief information of your publication can appear on the “Times Cited” page. This appearance can also help advertise your publication.

 

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The pumping speed of ISPs (ion sputter pumps) varies with pressure as shown in Figure 4210a. The operating pressure is in the range of less than 10-7 bar because the space charge in the Penning cells changes into a glow discharge and the sputtering process stops at higher pressures. The maximum pumping speed of ISPs is reached at about 10-9 bar.

Sputter Ion Pump (SIP)

Figure 4210a. Pumping speed vs pressure in ISPs.

Figure 4210b shows schematic illustration of a Transmission Electron Microscope (TEM) system. DP and RP are diffusion pump and rotary pump, respectively.

Schematic illustration of a Transmission Electron Microscope (TEM) system

Figure 4210b. Schematic illustration of a Transmission Electron Microscope (TEM) system.

 

 

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