Electron microscopy
Effect of Configuration of Objective Polepieces
on STEM/TEM Spatial Resolution
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


For the TEM configuration with a top-entry type EDS detector, the detector is placed above the objective lens in a TEM system with a high viewing angle (e.g. 70 °) to a horizontal specimen. Since the detector takes X-ray signals from the top of the objective lens, a large bore polepiece for the objective lens is needed. The use of such polepieces degrades the spatial resolution as well as the probe size.



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