TEM Specimen Grids for EDS Analysis
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


To avoid spurious x-rays in EDS analysis, materials with low atomic numbers are used for TEM specimen support grids. For instance, if small particles are analyzed, Be or polymeric grids with carbon films can be used instead of metal grids since Cu grids produce Cu peaks in the X-ray spectra. Those materials with low atomic numbers do not produce significant spurious X-ray signals.

On the other hand, the specimen grid can be made of a material that is not involved in the specimen. For instance, copper (Cu) is suitable for most silicate analyses, while nickel (Ni) or gold (Au) is applicable to the analysis of sulfides.




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