This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

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Figure 3851 shows the PVC (passive voltage contrast) in the contact level of WL (word line) decoder of a DRAM circuit. The p-contacts in n-well and n-/p- well contacts generate the brightest signal. P-contacts in n-well generate the brightest signal because of the forward bias in the pn-junction. The n-contacts in p-well generate the second brightest signal. The gate contacts generate dark signal because they are fully positively charged.

Figure 3851. The PVC in contact level of WL (word line) decoder of a DRAM circuit. Adapted from [1].

[1] Ruediger Rosenkranz, Failure localization with active and passive voltage contrast in FIB and SEM, J Mater Sci: Mater Electron (2011) 22:1523–1535.