Electron microscopy
 
EDS Measurements of Phosphorus (P)
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        


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As discussed on page4650, X-ray absorption is a function of the energy of X-rays. Low energy peaks will be more strongly absorbed than high energies ones. For thick TEM samples, k-factor correction due to X-ray absorption is needed in order to accurately quantify EDS measurements. Table 1315 lists P-examples of thicknesses at which the thin-film approximation is no longer valid due to X-ray absorption effects in specific materials.

Table 1315. Examples of limits to the thin-film approximation caused by X-ray absorption: Maximum thicknesses of thin specimens for which the absorption correction (or error) is less than ±10% and ±3%.

Material

10% error in kAB
3% error in kAB
Absorbed X-ray lines
Primary X-ray lines
Thickness (nm)
FeP
  34 P Kα Fe Kα (6.391 keV) and P Kα (2.014 keV)
Fe3P
  22 P Kα Fe Kα (6.391 keV) and P Kα (2.014 keV)

 

 

 

 

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