Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

EDS Measurements of Phosphorus (P)

As discussed on page4650, X-ray absorption is a function of the energy of X-rays. Low energy peaks will be more strongly absorbed than high energies ones. For thick TEM samples, k-factor correction due to X-ray absorption is needed in order to accurately quantify EDS measurements. Table 1315 lists P-examples of thicknesses at which the thin-film approximation is no longer valid due to X-ray absorption effects in specific materials. Table 1315. Examples of limits to the thin-film approximation caused by X-ray absorption: Maximum thicknesses of thin specimens for which the absorption correction (or error) is less than ±10% and ±3%. Material 10% error in kAB 3% error in kAB Absorbed X-ray lines Primary X-ray lines Thickness (nm) FeP   34 P Kα Fe Kα (6.391 keV) and P Kα (2.014 keV) Fe3P   22 P Kα Fe Kα (6.391 keV) and P Kα (2.014 keV)