EDS Measurements of Phosphorus (P) - Practical Electron Microscopy and Database - - An Online Book - |
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Microanalysis | EM Book https://www.globalsino.com/EM/ | ||||||||||||||||||
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As discussed on page4650, X-ray absorption is a function of the energy of X-rays. Low energy peaks will be more strongly absorbed than high energies ones. For thick TEM samples, k-factor correction due to X-ray absorption is needed in order to accurately quantify EDS measurements. Table 1315 lists P-examples of thicknesses at which the thin-film approximation is no longer valid due to X-ray absorption effects in specific materials.
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