Point Defects Created in FIB-EM Sample Preparation - Practical Electron Microscopy and Database - - An Online Book - |
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Microanalysis | EM Book https://www.globalsino.com/EM/ | ||||||||
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As shown in Figiure 1311, in FIB-EM sample preparation, point defects (e.g. vacancies and interstitials) are created underneath the amorphized layer. These point defects can:
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