Position and Length of Aberration Correctors
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The ideal location for placing an aberration corrector in an electron-optical column is exactly at the place where the aberration is introduced. In practice, this cannot be possible because of the limits of the sizes of the two parts. The resulting separation between the locations where an aberration is introduced and where it is removed produces higher order aberrations than the corrected one. For instance, the physical separation between the objective lens where the third order spherical aberration (Cs, or called C3,0) is introduced and the corrector where this aberration is removed induces a higher order spherical aberration, which is fifth order spherical aberration (C5,0) as indicated in green in Table 4579. However, the separation can be minimized by placing the corrector as close as possible to the objective lens, and by keeping the length of the corrector to a minimum (about 30 cm long normally).

 

 

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