Cost of EMs and Related Systems

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Cost of EMs and Related Systems

Considering commercial equipments, the prices of various EMs differs widely. In general, the costs of the instrument and maintenance are roughly in proportion to the maximum operating voltage of the same type of EMs. For instance, lower voltage TEMs have the advantage of reducing overall cost. Table 4380 lists the ranges of the prices of some tools or functions.

Table 4380. Ranges of the prices of some tools or functions.

Tool/part	Price	Application examples	Year quoted
FIB milling	$ 0.5~2 million
e-beam writer	$ 2.5~6 million
Laser writer	$ 0.5~1 million
Toshiba 1600XP/1600XPi Uninterruptible Power System (UPS)	$ 8,000	FEI and JEOL TEMs	2015
TEM	$ 1~4 million: E.g. $ 1 million for a JEOL 1200EXII, a Philips EM10, or a Hitachi 7000, and $ 4 million for a JEOL ARM 200F
Schottky type emitter	A cheaper way to replace a broken tip is to refurbish the old tip by replacing W needle with Zr coating

In general, FIB milling cost is about $300/hour, including the labor expense.

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Cost of EMs and Related Systems