Electron microscopy
 
Degradation of EDS Spatial Resolution due to Specimen Drift
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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X-ray acquisition time must be short enough to ensure that spatial resolution is not degraded by specimen drift and contamination and to ensure that artifact is not generated by beam damage.

The count of X-ray acquisition can be increased mainly by:
         i) Increase of acquisition time. The acquisition time may be increased if we have good stability of specimen stage and drift-correction software is used.
         ii) Increase of solid angle of EDS detector.
         iii) Thicker TEM specimens or SEM specimens are used. However, there are some drawbacks if such specimens are used.

 

 

 

 

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