Electron microscopy
Top-Entry Type EDS Detector
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   https://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


A top-entry type EDS detector is placed above the objective lens in a TEM system with a high viewing angle (e.g. 70 °) to a horizontal specimen. Since X-rays entering the detector take a large take-off angle (TOA) against the specimen, a high accuracy of quantitative analysis can be obtained. However, with such configuration, the solid angle of the detector against the specimen is small, resulting in low detection efficiency. On the other hand, since the detector takes X-ray signals from the top of the objective lens, a large bore polepiece for the objective lens is needed. The use of such polepieces degrades the spatial resolution as well as the probe size. Due to this reason, this type detector is not popular.



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