Atmospheric Thin Window (ATW) EDS Detector
- Practical Electron Microscopy and Database -
- An Online Book -  


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



The beryllium window on the conventional EDS detectors absorbed X-rays significantly, especially for the elements with atomic number ≤ 11. To detect the chemical elements with atomic number (Z) down to boron (B), the ultrathin (UTW) and atmospheric pressure (ATW) windows had been developed. Recently, the atmospheric thin window (ATW) and windowless detectors are the keys for analysis of the K lines of the light elements (4< Z <11; 0.110 < Ei< 1.04 keV) using EDS technique. Here, Z is atomic number and Ei is ionization energy of atoms.

Furthermore, the comparison of various EDS detectors with windowless, ultra-thin window, atmospheric thin window, and beryllium window is listed on a table on page3923.





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