Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| The X-ray signal in electron microscopes is usually collected by compact solid state detectors based on lithium-drifted silicon diodes. The X-ray photon is sorted by energy, hence the alternative names for X-ray fluorescence analysis are Energy Dispersive X-ray Spectroscopy (EDS or EDX). The solid-state EDS detectors are attached to the columns of the electron microscopes and normally consist of a collimator, window, lithium-drifted silicon detector, field effect transistor (FET), Dewar, and preamp as shown in Figure 4656.
Figure 4656. Schematic illustration of basic structure of an EDS detector with a solid state crystal.
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