The removal of such plural scattering events involves the deconvolution for the properly scaled low energy-loss region of the spectrum from the high energy-loss region. In EELS analysis, plural scattering can be removed by the following steps:
        i) Take the low loss region that includes the zero and plasmon losses.
        ii) Perform plural scattering removal.

Multiple scattering deconvolution is usually based on Fourier techniques and can introduce severe artifacts. However, because of the difficulties and inconveniences of multiple scattering corrections, we usually take EELS data from thin TEM specimens. A thin specimen can avoid multiple scattering which obscures the core-loss edges. That is, the sample should be so thin that the plasmon peak is smaller than one-tenth of the zero loss.

Table 4352. Other key readings related to multiple scattering corrections.

Deconvolution improves the signal to background ratio and sharpens the fine-structure in the spectrum. However, note that deconvolution can also introduce artifacts. Therefore, it is preferable to use specimen thin enough to be free of plural scattering if it is possible.