Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Scanning primary beam of ions has been used in many methods and techniques for imaging or modifying amorphous and crystalline materials, such as scanning helium ion microscopy (SHIM or HeIM), secondary ion mass spectrometry (SIMS), and focused ion beam (FIB). |