Topographic Contrast (Sharpness) Affected by the Detector Position in SEM
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The position of the detectors in SEM systems also affects the image contrast. For specimens having a large topographic contrast, regions located in valleys or wells are more easily imaged using an in-lens detector than a lateral detector (e.g. Everhart-Thornley (ET) detector). Figure 4573 gives an example. The two images were taken at 1 keV with an in-lens detector (Figure 4573 (a)) and a ET detector (Figure 4573 (b)). The shadowing effects are more pronounced for lateral ET detector with respect to the in-lens detector as indicated by circle A.  For small hills, the position of the ET detector introduced asymmetries in the imaging of equally inclined surfaces shown by circle B.

Influence of detector position on SEM images

Figure 4573. Influence of detector position on SEM images. Left image: obtained by in-lens detector; Right image: obtained by lateral ET detector. Adapted from [1].

[1] J. Cazaux, (2005) Recent developments and new strategies in scanning electron microscopy, Journal of Microscopy, 217, 16–35.

 

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