CBED Optimization for Strain Analysis
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


CBED technique needs to be optimized in order to perform accurate strain analysis:
        i) Use HOLZ lines. HOLZ reflections are sensitive to the changes of lattice parameters associated with the direction perpendicular to the electron incidence.
        ii) Reduce the elastic relaxation by using thick TEM specimen.
        iii) Employ an energy filter to remove the inelastically scattered electrons from HOLZ patterns. Thick TEM specimens give faded HOLZ patterns that make the analysis difficult because of inelastically scattered electrons in the specimen.




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