Practical Electron Microscopy and Database

This designation of Quartz PCI-AM reflects the software's capability to acquire high-resolution images from electron microscopes, such as Scanning Electron Microscopes (SEMs) and Transmission Electron Microscopes (TEMs), without interfering with the microscope's operation. The passive capture approach ensures that the original image data remains unaltered during acquisition, preserving the integrity of the measurements.

Quartz PCI serves as the foundational platform for image acquisition, processing, annotation, and measurement. The PCI-AM module enhances this platform by introducing automated measurement functionalities specifically tailored for semiconductor metrology. It enables precise and efficient analysis of semiconductor features, including trenches, pillars, lines, spaces, and complex two-dimensional shapes like contact holes and vias. By automating these measurements, PCI-AM significantly reduces the time and potential for human error associated with manual measurements, thereby improving consistency and throughput in semiconductor analysis.