Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Neon (Ne) Ion Sputtering Yield in Milling

Figure 1169 shows the Ne (neon) ion sputtering yield of various materials at Ne beam energies of 1 and 5 keV. The values for Sb, Te and Bi are enhanced for polyatomic sputtering (marked by the rectangles). Figure 1169. Ne ion sputtering yield of various materials (Z: atomic number) at Ne beam energies of 1 and 5 keV. [1]                 [1] M.P. Seah, An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions, Nuclear Instruments and Methods in Physics Research B 229 (2005) 348–358.