Attenuation of AES (Auger Electron Spectroscopy) Electrons - Practical Electron Microscopy and Database - - An Online Book - |
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Microanalysis | EM Book http://www.globalsino.com/EM/ | ||||||||
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Figure 1172 shows electron attenuation accounts for the surface sensitivity distribution of AES, which follows an exponential decay as function of depth according to a Beer-Lambert relation. Approximately 95% of all emission will originate from within the surface layer of ~10 nm.
[1] Lucille A. Giannuzzi and Fred A. Stevie, INTRODUCTION TO FOCUSED ION BEAMS: Instrumentation, Theory, Techniques and Practice, 2005.
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