Attenuation of AES (Auger Electron Spectroscopy) Electrons

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Attenuation of AES (Auger Electron Spectroscopy) Electrons

Figure 1172 shows electron attenuation accounts for the surface sensitivity distribution of AES, which follows an exponential decay as function of depth according to a Beer-Lambert relation. Approximately 95% of all emission will originate from within the surface layer of ~10 nm.

Electron attenuation accounts for the surface sensitivity distribution of AES

Figure 1172. Electron attenuation accounts for the surface sensitivity distribution of AES, which follows an exponential decay as function of depth according to a Beer-Lambert relation. [1]

[1] Lucille A. Giannuzzi and Fred A. Stevie, INTRODUCTION TO FOCUSED ION BEAMS: Instrumentation, Theory, Techniques and Practice, 2005.

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Attenuation of AES (Auger Electron Spectroscopy) Electrons